Fabrication and experimental analysis of series superconducting quantum inteference device array
نویسندگان
چکیده
串联超导量子干涉器件(superconducting quantum interference device, SQUID)阵列通过增加SQUID数量来达到提升信噪比的目的, 即SQUID电压信号随SQUID数目比例增加而总电压噪声正比于SQUID数目的平方根值. 本文介绍了利用自主工艺线进行串联SQUID阵列研究的相关研究进展, 实现了SQUID数量分别为200和800的阵列集成, 测试得到磁通噪声达到0.5 \begin{document}$ \text{μ}\varPhi _{\text{0}}/\sqrt{\text{Hz}} $\end{document}和输入电流灵敏度35 id="M2">\begin{document}$ \text{μA/}\varPhi _{\text{0}} xlink:href="17-20210467_M2.jpg"/>, 等效输入电流噪声达到18 id="M3">\begin{document}$ \text{pA/}\sqrt{\text{Hz}} xlink:href="17-20210467_M3.jpg"/>. 另外, 还给出了阵列参数与集成SQUID数量的关系, 验证了设计可靠性和工艺一致性.
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ژورنال
عنوان ژورنال: Chinese Physics
سال: 2021
ISSN: ['1000-3290']
DOI: https://doi.org/10.7498/aps.70.20210467